| A B C D E F G H I J K L M N O P Q R S T U V W X Y Z | |||||||||||
| Aluminum | Al | 660 | 2.700 | 1.080 | 677 | 821 | 1010 | eBeam (Xlnt), Thermal | TiB2-BN, ZrB2, BN | TiB2,W | Alloys and wets. Fill Boat 2/3. |
| Aluminum Antimonide |
AlSb | 1080 | 4.3 | -- | -- | -- | -- | -- | -- | -- | -- |
| Aluminum Arsenide |
AlAs | 1600 | 3.7 | -- | -- | -- | ~1300 | -- | - | -- | -- |
| Aluminum Bromide |
AlBr3 | 97 | 3.01 | -- | -- | -- | ~50 | -- | G | Mo | -- |
| Aluminum Carbide |
Al4C3 | 1400 | 2.36 | -- | -- | -- | ~800 | ebeam (Fair) | -- | -- | n = 2.7 |
| Aluminum 2% Copper |
Al2%Cu | 640 | 2.8 | -- | -- | -- | -- | -- | -- | -- | Wire feed and flash. Difficult from dual sources |
| Aluminum Fluoride |
AlF3 | 1257 | 3.07 | -- | 410 | 490 | 700 | eBeam (Poor) | G | Mo, W | n = 1.38 @ .55µ |
| sublimes | ........sublimes........ | ||||||||||
| Aluminum Nitride |
AlN | -- | 3.26 | -- | -- | -- | ~1750 | ebeam (Fair) | -- | -- | Decomposes. Reactive evaporate in 10-3 N2 with glow discharge. |
| sublimes | |||||||||||
| Aluminum Oxide (Alumina) |
Al2O3 | 2045 | 3.970 | 0.336 | -- | -- | 1550 | eBeam (Xlnt), sputter | -- | W | Sapphire xlnt in ebeam, forms smooth, hard films. n=1.66 |
| Aluminum 2% Silicon |
Al2%Si | 640 | 2.6 | -- | -- | -- | 1010 | -- | TiB2-BN | -- | Wire feed and flash. Difficult from dual sources. |
| Antimony | Sb | 630 | 6.68 | -- | 279 | 345 | 425 | eBeam (Poor) | BN, C, Al2O3 | Mo, Ta, Al2O3 Coated | Toxic. Evaporates well. Film structure is rate-dependent. |
| ........sublimes........ | |||||||||||
| Antimony Telluride | Sb2Te3 | 619 | 6.50 | -- | -- | -- | 600 | -- | C | -- | Decomposes over 750 ° C |
| Antimony Trioxide | Sb2O3 | 656 | 5.2 or 5.76 | -- | -- | -- | ~300 | eBeam (Good) | BN, Al2O3 | Pt | Toxic. Decomposes on W. n = 2.05 |
| ........sublimes........ | |||||||||||
| Antimony Triselenide | Sb2Se3 | 611 | -- | -- | -- | -- | -- | -- | C | Ta | Stoichiometry variable |
| Antimony Trisulphide | Sb2S3 | 550 | 4.64 | -- | -- | -- | ~200 | ebeam (Good) | Al2O3 | Mo, Ta | n = 3.01 @.55µ No Decomposition. |
| Arsenic | As | 814 | 5.73 | -- | 107 | 150 | 210 | eBeam (Poor) | Al2O3, BeO, VC | C | Toxic. Sublimes rapidly at low temerature. |
| ........sublimes........ | |||||||||||
| Arsenic Selenide | As2Se3 | 360 | 4.75 | -- | -- | -- | -- | -- | Al2O3, Quartz | -- | n = 2.41 @3.8µ JVST 10, 748(1973) |
| Arsenic Trisulphide | As2S3 | 300 | 3.43 | -- | -- | -- | ~400 | ebeam (Fair) | Al2O3, Quartz | Mo | n = 2.8 JVST 10, 748(1973) |
| Arsenic Tritelluride | As2Te3 | 362 | -- | -- | -- | -- | -- | -- | -- | Flash | JVST 10, 748(1975) |
| Barium | Ba | 710 | 3.78 | -- | 545 | 627 | 735 | eBeam (Fair) | Metals | W, Ta, Mo | Wets w/o alloying - reacts with ceramics. |
| Barium Chloride | BaCl2 | 962 | 3.86 | -- | -- | -- | ~650 | -- | -- | Ta, Mo | use general preheat to outgas. |
| Barium Fluoride | BaF2 | 1280 | 4.83 | -- | -- | -- | ~700 | eBeam (Good) | -- | Mo | n = 1.29 @5µ JVST 21, 2052 (1982) Density Rate Dependent |
| ........sublimes........ | |||||||||||
| Barium Oxide | BaO | 1923 | 5.72 or 5.32 | -- | -- | -- | ~1300 | ebeam (Poor) | Al2O3 | Pt | Decomposes slightly. n = 1.98 |
| Barium Sulphide | BaS | 2200 | 4.25 | -- | -- | -- | 1100 | -- | -- | Mo | n = 2.16 |
| Barium Titanate | BaTiO3 | Decomposes | 6.0 | -- | ........Decomposes........ | -- | -- | -- | Decomposes, yields free Ba from single source; sputtering preferred; or co-evaporate from 2 sources | ||
| Beryllium | Be | 1278 | 1.85 | -- | 710 | 878 | 1000 | eBeam (Xlnt) | BeO, C, Vit. Carbon | W, Ta | Wets W/Mo/Ta. Metal powder and oxides are toxic. Evaporates easily. |
| Beryllium Chloride | BeCl2 | 440 | 1.90 | -- | -- | -- | ~150 | -- | -- | -- | -- |
| Beryllium Fluoride | BeF2 | 800 | 1.99 | -- | -- | -- | ~200 | eBeam (Good) | -- | -- | Toxic. |
| ........sublimes........ | |||||||||||
| Beryllium Oxide | BeO | 2530 | 3.01 | -- | -- | -- | 1900 | ebeam (Good) | -- | -- | Powders toxic. No decomposition from EB guns. n = 1.72 |
| Bismuth | Bi | 271 | 9.80 | -- | 330 | 410 | 520 | eBeam (Xlnt) | Al2O3, VC | W, Mo, Al2O3, Ta | Vapors are toxic. High resistivity. No shorting of baskets. |
| Bismuth Fluoride | BiF3 | 727 | 8.75 | -- | -- | -- | ~300 | -- | G | -- | n = 1.74 @ 1µ, 1.64 @ 10µ App. Opt. 18, 105 (1979) |
| ........sublimes........ | |||||||||||
| Bismuth Oxide | Bi2O3 | 820 | 8.9 | -- | -- | -- | ~1400 | ebeam (Poor) | -- | Pt | Vapors are toxic. n = 2.55. JVST 12, 63 (1975) |
| Bismuth Selenide | Bi2Se3 | 710 | 7.66 | -- | -- | -- | ~650 | ebeam (Good) | G, Quartz | -- | Sputtering preferred; co-evaporate from 2 sources. |
| Bismuth Telluride | Bi2Te3 | 585 | 7.85 | -- | -- | -- | ~600 | -- | G, Quartz | W, Mo | Sputtering preferred; co-evaporate from 2 sources. |
| Bismuth Titanate | Bi2Ti2O7 | -- | -- | -- | ........Decomposes........ | -- | -- | -- | Decomposes. Sputtering preferred; or co-evaporate from 2 sources in 10-2O2. | ||
| Bismuth Trisulphide | Bi2S3 | 685 | 7.39 | -- | -- | -- | -- | -- | -- | -- | n = 1.5 |
| Boron | B | 2100 | 2.36 | 0.389 | 1278 | 1548 | 1797 | eBeam (Xlnt), sputter | C, VC | C | Material explodes with rapid cooling. Forms carbide with container. |
| ........sublimes........ | |||||||||||
| Boron Carbide | B4C | 2350 | 2.50 | -- | 2500 | 2580 | 2650 | ebeam (xlnt) | -- | -- | similar to Chromium. |
| Boron Nitride | BN | 2300 | 2.20 | -- | -- | -- | ~1600 | eBeam (Poor) | -- | -- | Sputtering preferred; Decomposes. |
| ........sublimes........ | |||||||||||
| Boron Oxide | B2O3 | 460 | 1.82 | -- | -- | -- | ~1400 | ebeam (Good) | -- | Pt, Mo | n = 1.46 |
| Boron Trisulphide | B2S3 | 310 | 1.55 | -- | -- | -- | 800 | -- | G | -- | -- |
| Cadmium | Cd | 321 | 8.64 | -- | 64 | 120 | 180 | ebeam (Poor) | Al2O3, Quartz | W, Cb, Mo, Ta | Poisons vacuum systems, low sticking coefficient. |
| Cadmium Antimonide | CdSb | 456 | 6.92 | -- | -- | -- | -- | -- | -- | -- | -- |
| Cadmium Arsenide | Cd3As2 | 721 | 6.21 | -- | -- | -- | -- | -- | Quartz | -- | -- |
| Cadmium Bromide | CdBr2 | 567 | 5.19 | -- | -- | -- | ~300 | -- | -- | -- | -- |
| Cadmium Chloride | CdCl2 | 570 | 4.05 | -- | -- | -- | ~400 | -- | -- | -- | -- |
| Cadmium Fluoride | CdF2 | 1070 | 6.64 | -- | -- | -- | ~500 | -- | -- | -- | n = 1.56 |
| Cadmium Iodide | CdI2 | 400 | 5.30 | -- | -- | -- | ~250 | -- | -- | -- | -- |
| Cadmium Oxide | CdO | 900 | 6.95 | -- | -- | -- | ~530 | -- | -- | -- | Disproportionates. n = 2.49 |
| Cadmium Selenide | CdSe | 1264 | 5.81 | -- | -- | -- | 540 | eBeam (Good) | Al2O3, Quartz | Mo, Ta | Evaporates easily. n = 2.4 @.6µ |
| ........sublimes........ | |||||||||||
| Cadmium Siliside | CdSiO2 | -- | -- | -- | -- | -- | ~600 | -- | -- | -- | Disproportionates. n = 1.69 |
| Cadmium Sulphide | CdS | 1750 | 4.82 | -- | -- | -- | 550 | eBeam (Fair) | Al2O3, Quartz | W, Mo, Ta | Sticking Coefficient strongly affected by substrate temperature. Stoichiometry variable. n = 2.4. JVST 12, 188(1975) |
| ........sublimes........ | |||||||||||
| Cadmium Telluride | CdTe | 1098 | 6.20 | -- | -- | -- | 450 | -- | -- | W, Mo, Ta | Stoichiometry depends in substrate temperature. n = 2.6. |
| Calcium | Ca | 842 | 1.55 | -- | 272 | 357 | 459 | eBeam (Poor) | Al2O3, Quartz | W | Corrodes in air. |
| ........sublimes........ | |||||||||||
| Calcium Fluoride | CaF2 | 1360 | 3.18 | -- | -- | -- | ~1100 | ebeam (Xlnt) | Quartz | W, Mo, Ta | Rate control important. Use gentle preheat to outgas. n = 1.2-1.4 |
| Calcium Oxide | CaO | 2580 | 3.35 | -- | -- | -- | ~1700 | -- | ZrO2 | W, Mo | Forms volatile oxides with W and Mo. n = 1.84. |
| Calcium Silicate | CaO - SiO2 | 1540 | 2.90 | -- | -- | -- | -- | ebeam(Good) | Quartz | -- | n = 1.61 |
| Calcium Sulphide | CaS | -- | 2.18 | -- | -- | -- | 1100 | -- | -- | Mo | Decomposes. n = 2.14 |
| sublimes | |||||||||||
| Calcium Titanate | CaTiO3 | 1975 | 4.10 | -- | 1490 | 1600 | 1690 | ebeam (Poor) | -- | -- | Disproportionates except in sputtering. |
| Calcium Tungstate | CaWO4 | 1620 | 6.06 | -- | -- | -- | -- | ebeam (Good) | -- | W | n = 1.92 |
| Carbon (diamond) |
C | -- | 1.8-2.3 | 0.220 | 1657 | 1867 | 2137 | eBeam (Xlnt), sputter | -- | -- | EB preferred. Arc evaporation. Poor film adhesion. Sublimes. Vitreous carbon n = 1.47 |
| sublimes | ........sublimes........ | ||||||||||
| Cerium | Ce | 795 | 8.23 | -- | 970 | 1150 | 1380 | ebeam (Good) | Al2O3, BeO, VC | W, Ta | Films oxidize easily. |
| Ceric Oxide | CeO2 | 2600 | 7.3 | -- | 1890 | 2000 | 2310 | eBeam (Good) | -- | W | Use 250-300° C substrate temperature. n = 2.2 - 2.4. Reacts with W. |
| ........sublimes........ | |||||||||||
| Cerium Fluoride | CeF3 | 1418 | 6.16 | -- | -- | -- | ~900 | ebeam (Good) | -- | W, Mo, Ta | Use gentle preheat to outgas. n = 1.63@ .55µ |
| Cerium Oxide | Ce2O3 | 1692 | 6.87 | -- | -- | -- | -- | ebeam (Fair) | -- | W | Alloys with source; use .015-.020 W boat. n = 1.95 |
| Cesium | Cs | 28 | 1.87 | -- | -16 | +22 | +30 | -- | Quartz | S.S. | -- |
| Cesium Bromide | CsBr | 636 | 4.44 | -- | -- | -- | ~400 | -- | -- | W | n = 1.70 |
| Cesium Chloride | CsCl | 646 | 3.97 | -- | -- | -- | ~500 | -- | -- | W | n = 1.64 Hygroscopic |
| Copyright Lebow Corporation 1990, All Rights Reserved | |||||||||||
| Cesium Fluoride | CsF | 684 | 3.59 | -- | -- | -- | ~500 | -- | -- | W | -- |
| Cesium Hydroxide | CsOH | 272 | 3.67 | -- | -- | -- | 550 | -- | -- | Pt | -- |
| Cesium Iodide | CsI | 621 | 4.51 | -- | -- | -- | ~500 | -- | Pt, Quartz | W, Pt | n = 1.79 |
| Chiolote | Na5Al3F14 | -- | 2.9 | -- | -- | -- | ~800 | -- | -- | Mo, W | n = 1.33 |
| Chromium | Cr | 1890 | 7.200 | 0.305 | 837 | 977 | 1157 | eBeam (Good), Thermal | VC | W, Cr rod or strip | Films very adherent. High rates possible. |
| ........sublimes........ | |||||||||||
| Chromium Boride | CrB | 2760 | 6.17 | -- | -- | -- | -- | -- | -- | -- | -- |
| Chromium Bromide | CrBr2 | 842 | 4.36 | -- | -- | -- | 550 | -- | -- | Inconel | -- |
| Chromium Carbide | Cr3C2 | 1890 | 6.68 | -- | -- | -- | ~2000 | ebeam (Fair) | -- | W | -- |
| Chromium Chloride | CrCl2 | 824 | 2.75 | -- | -- | -- | 550 | -- | -- | Fe, Inconel | Sublimes easily. |
| Chromium Oxide | Cr2O3 | 2435 | 5.21 | -- | -- | -- | ~2000 | ebeam (Good) | -- | W, Mo | Disproportionates to lower oxides, reoxidizes @600° C in air. n = 2.4 |
| Chromium Silicide | Cr3Si | 1710 | 6.51 | -- | -- | -- | -- | -- | -- | -- | -- |
| Chromium Silicon Monoxide | Cr-SiO | .......Influenced by Composition....... | ebeam (Good) | -- | W | Flash | |||||
| Cobalt | Co | 1495 | 8.90 | -- | 850 | 990 | 1200 | eBeam (Xlnt) | Al2O3, BeO | W, Cb | Alloys with refractory metals. |
| Cobalt Bromide | CoBr2 | 678 | 4.91 | -- | -- | -- | 400 | -- | -- | Inconel | -- |
| ........sublimes........ | |||||||||||
| Cobalt Chloride | CoCl2 | 740 | 3.36 | -- | -- | -- | 472 | -- | -- | Inconel | -- |
| ........sublimes........ | |||||||||||
| Cobalt Oxide | CoO | 1935 | 5.68 | -- | -- | -- | -- | -- | -- | -- | Sputtering preferred. |
| Copper | Cu | 1083 | 8.920 | 0.437 | 727 | 857 | 1017 | eBeam (Xlnt), Thermal |
Al2O3, Mo, Ta | W, Mo | Films do not adhere well. Use intermediate layer, e.g. Chromium. Evaporates from any source material. |
| Copper Chloride | CuCl | 422 | 3.53 | -- | -- | -- | ~600 | -- | -- | -- | n = 1.93 |
| Copper Oxide | Cu2O | 1235 | 6.0 | -- | -- | -- | ~600 | eBeam (Good), Thermal | Al2O3 | Ta | Evaporate in 10-2-10-4 of O2; n = 2.70. J. Electrochem. Soc. 110, 119(1967) |
| ........sublimes........ | |||||||||||
| Copper Sulfide | CuS | 1113 | 6.75 | -- | -- | -- | ~500 | -- | -- | -- | n = 1.45 |
| ........sublimes........ | |||||||||||
| Cryolite | Na3AlF6 | 1000 | 2.9 | -- | 1020 | 1260 | 1480 | eBeam (Xlnt) | VC | W, Mo, Ta | Large chunks reduce spitting. Little decomposition. n = 2.34 at 6330A App. Opt. 15, 1969(1976) |
| Dysprosium | Dy | 1409 | 8.54 | -- | 625 | 750 | 900 | ebeam (Good) | -- | Ta | -- |
| Dysprosium Fluoride | DyF3 | 1360 | 6.0 | -- | -- | -- | ~800 | eBeam (Good) | -- | Ta | -- |
| ........sublimes........ | |||||||||||
| Dysprosium Oxide | Dy2O3 | 2340 | 7.81 | -- | -- | -- | ~1400 | -- | -- | Ir | Loses Oxygen. |
| Erbium | Er | 1497 | 9.060 | 0.740 | 650 | 775 | 930 | eBeam (good), Thermal | -- | W,Ta | Sublimes |
| ........sublimes........ | |||||||||||
| Erbium Fluoride | ErF3 | 1350 | 7.81 | -- | -- | -- | ~750 | -- | -- | Mo | JVST A3 (6) 2320 |
| Erbium Oxide | Er2O3 | 2400 | 8.64 | -- | -- | -- | ~1600 | -- | -- | Ir | Loses Oxygen. |
| Europium | Eu | 822 | 5.26 | -- | 280 | 360 | 480 | eBeam (Fair) | Al2O3 | W,Ta | Low Tantalum solubility. |
| ........sublimes........ | |||||||||||
| Europium Fluoride | EuF2 | 1380 | 6.5 | -- | -- | -- | ~950 | -- | -- | Mo | -- |
| Europium Oxide | Eu2O3 | 2056 | 7.42 | -- | -- | -- | ~1600 | ebeam (Good) | ThO2 | Ir, Ta, W | Loses Oxygen; films clear and hard. |
| Europium Sulphide | EuS | -- | 5.75 | -- | -- | -- | -- | ebeam (Good) | -- | -- | -- |
| Gadolinium | Gd | 1312 | 7.89 | -- | 760 | 900 | 1175 | ebeam (Xlnt) | Al2O3 | Ta | High Ta solubility. |
| Gadolinium Oxide | Gd2O3 | 2310 | 7.41 | -- | -- | -- | -- | ebeam (Fair) | -- | Ir | Loses Oxygen; n = 1.8 @ .55µ |
| Gallium | Ga | 30 | 5.90 | -- | 619 | 742 | 907 | ebeam (Good) | Al2O3, BeO, Quartz | -- | Alloys with refractory metals. Use EB gun. |
| Gallium Atimonide | GaSb | 710 | 5.6 | -- | -- | -- | -- | ebeam (Fair) | -- | W, Ta | Flash Evaporate. |
| Gallium Arsenide | GaAs | 1238 | 5.3 | -- | -- | -- | -- | ebeam (Good) | Carbon | W, Ta | Flash Evaporate. n = 5.64 @ 10.6µ |
| Gallium Nitride | GaN | -- | 6.1 | -- | -- | -- | ~200 | Al2O3 | -- | -- | Evaporate Ga in 10-3 N2. |
| sublimes | |||||||||||
| Gallium Oxide (β) | Ga2O3 | 1900 | 5.88 | -- | -- | -- | -- | -- | -- | Pr, W | Loses Oxygen. |
| Gallium Phosphide | GaP | 1540 | 4.1 | -- | -- | 770 | 920 | -- | Quartz | W, Ta | Decomposes vapor mostly P. |
| Germanium | Ge | 937 | 5.350 | 0.516 | 812 | 957 | 1167 | eBeam (Xlnt) | Al2O3, Quartz |
W, C, Ta | Excellent films from EB sources. Use .040 W. n = 4.01 |
| Germanium Nitride | Ge3N2 | 450 | 5.2 | -- | -- | -- | ~650 | -- | -- | -- | Sputtering preferred. |
| ........sublimes........ | |||||||||||
| Germanium Oxide | GeO2 | 1086 | 6.24 | -- | -- | -- | ~625 | ebeam(Good) | Quartz, Al2O3 | Ta, Mo | Similar to SiO, film predominantly GeO. |
| Germanium Telluride | GeTe | 725 | 6.20 | -- | -- | -- | 381 | -- | Quartz, Al2O3 | W, Mo | -- |
| Glass Schott 8329 | -- | -- | 2.20 | -- | -- | -- | -- | ebeam (Xlnt) | -- | -- | Evaporable alkali glass. Melt in air before evaporating. n = 1.47. |
| Gold | Au | 1062 | 19.320 | 0.381 | 807 | 947 | 1132 | eBeam (Xlnt), Thermal | BN, Al2O3, VC | W, Mo, Al2O3 |
May not adhere well. Films soft. |
| Hafnium | Hf | 2230 | 13.09 | -- | 2160 | 2250 | 3090 | eBeam (Good) | -- | -- | -- |
| Hafnium Boride | HfB2 | 3250 | 10.5 | -- | -- | -- | -- | -- | -- | -- | -- |
| Hafnium Carbide | HfC | 4160 | 12.2 | -- | -- | -- | ~2600 | -- | -- | -- | -- |
| ........sublimes........ | |||||||||||
| Hafnium Nitride | HfN | 2852 | 13.8 | -- | -- | -- | -- | -- | -- | -- | -- |
| Hafnium Oxide | HfO2 | 2812 | 9.68 | -- | -- | -- | ~2500 | ebeam (Fair) | -- | W | Film HfO n = 2.0 @ .5µ App. Opt. Apr. 1977 |
| Hafnium Silicide | HfSi2 | 1750 | 7.2 | -- | -- | -- | -- | -- | -- | -- | -- |
| Holmium | Ho | 1470 | 8.80 | -- | 650 | 770 | 950 | ebeam (Good) | -- | W, Ta | -- |
| ........sublimes........ | |||||||||||
| Holmium Fluoride | HoF3 | 1143 | 7.64 | -- | -- | -- | ~800 | -- | Quartz | -- | -- |
| Holmium Oxide | Ho2O3 | 2370 | 8.41 | -- | -- | -- | -- | -- | -- | Ir | Loses Oxygen. |
| Inconel | Ni/Cr/Fe | 1425 | 8.5 | -- | -- | -- | -- | ebeam (Good) | -- | W | Use fine wire pre-wrapped on W. Low rate req'd. for smooth films. |
| Indium | In | 157 | 7.30 | 0.841 | 487 | 597 | 742 | eBeam (Xlnt) | G, Al2O3, Mo liner |
W, Mo | Wets W and Cu. use Mo liner in gun. |
| Indium Antimonide | InSb | 535 | 5.8 | -- | 500 | -- | ~400 | -- | -- | W | Toxic. Decomposes; sputtering preferred; or co-evaporate from 2 sources; flash. n = 4.3 @ 1µ |
| Indium Arsenide | InAs | 943 | 5.7 | -- | 780 | 870 | 970 | -- | -- | W | Toxic. Sputtering preferred; or co-evaporate from 2 sources; flash. n = 4.5 @ 1µ |
| Indium Oxide | In2O3 | 1565 | 7.18 | -- | -- | -- | ~1200 | ebeam (Good) | Al2O3 | W, Pt | Film In2O; transparent conductor. JVST 12, 99(1975) |
| ........sublimes........ | |||||||||||
| Indium Phosphide | InP | 1058 | 4.8 | -- | -- | 630 | 730 | -- | G | W, Ta | Deposits P. rich. Flash evaporate. |
| Indium Selenide | In2Se3 | 890 | 5.7 | -- | -- | -- | -- | -- | -- | -- | Sputtering preferred; or co-evaporate from 2 sources; flash. |
| Indium Sesquisulphide | In2S3 | 1050 | 4.90 | -- | -- | -- | 850 | -- | G | -- | Film In2S |
| ........sublimes........ | |||||||||||
| Indium Sulphide | In2S | 653 | 5.87 | -- | -- | -- | 650 | -- | G | -- | -- |
| Indium Telluride | In2Te3 | 667 | 5.8 | -- | -- | -- | -- | -- | -- | -- | Sputtering preferred; or co-evaporate from 2 sources; flash. |
| Indium Tin Oxide | In2O3-SnO2 | 1800 | 6.43-7.14 | -- | -- | -- | -- | eBeam (good) | G | W, Mo | Sublimes. 90 In203:10 Sn02 wt%. anneal req. for transparancy and improved conductivity. |
| Iridium | Ir | 2459 | 22.65 | -- | 1850 | 2080 | 2380 | ebeam (Fair) | ThO2 | -- | -- |
| Iron | Fe | 1535 | 7.860 | 0.349 | 858 | 998 | 1180 | eBeam (Xlnt) | BeO, Al2O3 |
W | Attacks Tungsten. Use gentle preheat to outgas. Films hard, smooth. |
| Iron Bromide | FeBr2 | 689 | 4.64 | -- | -- | -- | 561 | -- | Fe | -- | -- |
| Iron Chloride | FeCl2 | 670 | 2.98 | -- | -- | -- | 300 | -- | Fe | -- | -- |
| ........sublimes........ | |||||||||||
| Copyright Lebow Corporation 1990, All Rights Reserved | |||||||||||
| Iron Iodide | FeI2 | 592 | 5.31 | -- | -- | -- | 400 | -- | Fe | -- | -- |
| Iron Oxide | FeO | 1425 | 5.7 | -- | -- | -- | -- | ebeam (Poor) | -- | -- | Decomposes; sputtering preferred. |
| Iron Oxide | Fe2O3 | 1565 | 5.24 | -- | -- | -- | -- | ebeam (Good) | -- | W | Disproportionates at Fe3O4 at 1530° C, n = 3.0 |
| Iron Sulphide | FeS | 1195 | 4.84 | -- | -- | -- | -- | -- | Al2O3 | -- | Decomposes. |
| Kanthal | FeCrAl | 1500 | 7.1 | -- | -- | -- | ~1150 | -- | -- | W | JVST 7, 739(1980) |
| Lanthanum | La | 920 | 6.17 | -- | 990 | 1212 | 1388 | ebeam (Xlnt) | Al2O3 | W, Ta | Films will burn in air if Scraped. |
| Lanthanum Boride | LaB6 | 2210 | 2.61 | -- | -- | -- | -- | ebeam (Good) | -- | -- | -- |
| Lanthanum Bromide | LaBr3 | 783 | 5.06 | -- | -- | -- | -- | -- | -- | -- | n = 1.94 Hygroscopic |
| Lanthanum Fluoride | LaF3 | 1490 | 6.0 | -- | -- | -- | 900 | ebeam (Good) | -- | Ta, Mo | No Decomposition. n = 1.59 @ .55µ |
| ........sublimes........ | |||||||||||
| Lanthanum Oxide | La2O3 | 2250 | 5.84 | -- | -- | -- | 1400 | ebeam (Good) | -- | W, Ta | Loses oxygen. n = 1.9 @ .5µ |
| Lead | Pb | 328 | 11.34 | 1.130 | 342 | 427 | 497 | eBeam (xlnt), Thermal | Quartz, Al2O3 | W, Mo | Toxic. Carefully controlled rates req'd. for superconductors. |
| Lead Bromide | PbBr2 | 373 | 6.66 | -- | -- | -- | ~300 | -- | -- | -- | -- |
| Lead Chloride | PbCl2 | 501 | 5.85 | -- | -- | -- | ~325 | -- | Al2O3 | Pt | Little decomposition. n = 2.2 |
| Lead Fluoride | PbF2 | 822 | 8.24 | -- | -- | -- | ~400 | -- | BeO | W, Pt, Mo | Toxic. n = 1.75 @ .3µ |
| ........sublimes........ | |||||||||||
| Lead Iodide | PbI2 | 502 | 6.16 | -- | -- | -- | ~500 | -- | Quartz | Pt | n = 2.7 J.Opt. Soci. 65, 914 |
| Lead Oxide | PbO | 890 | 9.53 | -- | -- | -- | ~550 | -- | Quartz, Al2O3 | Pt | No Decomposition. n = 2.55 |
| Lead Stannate | PbSnO3 | 1115 | 8.1 | -- | 670 | 780 | 905 | ebeam (Poor) | Al2O3 | Pt | Disproportionates. |
| Lead Selenide | PbSe | 1065 | 8.10 | -- | -- | -- | ~500 | -- | G, Al2O3 | W, Mo | -- |
| ........sublimes........ | |||||||||||
| Lead Sulphide | PbS | 1114 | 7.5 | -- | -- | -- | 550 | -- | Quartz, Al2O3 | W | Little Decomposition. n = 3.91 |
| ........sublimes........ | |||||||||||
| Lead Telluride | PbTe | 917 | 8.16 | -- | 780 | 910 | 1050 | -- | G, Al2O3 | Mo, Pt, Ta | Vapors toxic. Deposits Te rich. Sputtering preferred, or co-evaporate from sources. n = 5.6 @ 5µ |
| Lead Titanate | PbTiO3 | -- | 7.52 | -- | -- | -- | -- | -- | -- | Ta | -- |
| Lithium | Li | 179 | 0.53 | -- | 227 | 307 | 407 | ebeam (Good) | BeO, Al2O3 | Ta, S.S. | Metal reacts violently in air. |
| Lithium Bromide | LiBr | 547 | 3.46 | -- | -- | -- | ~500 | -- | -- | Ni | n = 1.78 |
| Lithium Chloride | LiCl | 613 | 2.07 | -- | -- | -- | 400 | -- | -- | Ni | Use gentle preheat for outgas. n = 1.66 |
| Lithium Fluoride | LiF | 870 | 2.60 | -- | 875 | 1020 | 1180 | ebeam (Good) | Al2O3 | Ni, Ta, Mo, W | Rate control important for optical films. Use gentle preheat for outgas. n = 1.36. J. Appl. Opt. 11, 2245(1972) |
| Lithium Iodide | LiI | 446 | 4.06 | -- | -- | -- | 400 | -- | -- | Mo, W | -- |
| Lithium Oxide | Li2O | 1427 | 2.01 | -- | -- | -- | 850 | -- | -- | Pt, Ir | n = 1.64 |
| Lutetium | Lu | 1652 | 9.84 | -- | -- | -- | 1300 | ebeam (Xlnt) | Al2O3 | Ta | -- |
| Lutetium Oxide | Lu2O3 | 2489 | 9.41 | -- | -- | -- | 1400 | -- | -- | Ir | Decomposes. |
| Magnesium | Mg | 651 | 1.74 | -- | 185 | 247 | 327 | ebeam (Good) | VC, Al2O3 | W, Mo, Ta, Cb | Extremely hich rates possible. |
| ........sublimes........ | |||||||||||
| Magnesium Aluminate | MgAl2O4 | 2135 | 3.6 | -- | -- | -- | -- | ebeam (Good) | -- | -- | Natural spinel. |
| Magnesium Bromide | MgBr2 | 700 | 3.72 | -- | -- | -- | ~450 | -- | -- | Ni | Decomposes. |
| Magnesium Chloride | MgCl2 | 708 | 2.32 | -- | -- | -- | 400 | -- | -- | Ni | Decomposes. n = 1.6 |
| Magnesium Fluoride | MgF2 | 1266 | 2.9-3.2 | -- | -- | -- | 1000 | ebeam (Xlnt) | Al2O3 | Mo, Ta | Rate control and substrate heat important for optical films. n = 1.38 J. Appl. Opt. 11, 2245(1972) |
| Magnesium Iodide | MgI2 | 700 | 4.24 | -- | -- | -- | 200 | -- | -- | Ir | -- |
| Magnesium Oxide | MgO | 2800 | 3.58 | -- | -- | -- | 1300 | ebeam (Good) | C, Al2O3 | -- | W produces volatile oxides. n = 1.7 J. Appl. Opt.11, 2243 (1972) |
| Manganese | Mn | 1244 | 7.20 | -- | 507 | 572 | 647 | ebeam (Good) | BeO, Al2O3 | W, Mo, Ta | -- |
| ........sublimes........ | |||||||||||
| Manganese Bromide | MnBr2 | 695 | 4.38 | -- | -- | -- | 500 | -- | -- | Inconel | -- |
| Manganese Chloride | MnCl2 | 650 | 2.98 | -- | -- | -- | 450 | -- | -- | Inconel | -- |
| Manganese Oxide | Mn3O4 | 1705 | 4.86 | -- | -- | -- | -- | -- | -- | W | -- |
| Manganese Sulphide | MnS | 1615 | 3.99 | -- | -- | -- | 1300 | -- | -- | Mo | Decomposes. n = 2.7 |
| Mercury | Hg | -39 | 13.55 | -- | -68 | -42 | -6 | -- | -- | -- | -- |
| Mercury Sulphide | HgS | -- | 8.10 | -- | -- | -- | 250 | -- | Al2O3 | -- | Decomposes. |
| sublimes | ........sublimes........ | ||||||||||
| Molybdenum | Mo | 2610 | 10.22 | -- | 1592 | 1822 | 2117 | ebeam (Xlnt) | -- | -- | Films smooth, hard. Careful degas req'd. |
| Molybdenum Boride | MoB2 | 2100 | 7.12 | -- | -- | -- | -- | ebeam (Poor) | -- | -- | -- |
| Molybdenum Carbide | Mo2C | 2687 | 9.18 | -- | -- | -- | -- | ebeam (Fair) | -- | -- | Evaporation of Mo(CO)6 yeilds Mo2C |
| Molybdenum Disulphide | MoS2 | 1185 | 4.80 | -- | -- | -- | ~50 | -- | -- | -- | -- |
| Molybdenum Silicide | MoSi2 | 2050 | 6.3 | -- | -- | -- | ~50 | -- | -- | W | Decomposes. |
| Molybdenum Trioxide | MoO3 | 795 | 4.70 | -- | -- | -- | ~900 | -- | Al2O3, BN | Mo, Pt | Slight O2 loss. n = 1.9 |
| Neodymium | Nd | 1024 | 7.00 | -- | 731 | 871 | 1062 | ebeam (Xlnt) | Al2O3 | Ta | Low Ta solubility. |
| Neodymium Fluoride | NdF3 | 1410 | 6.5 | -- | -- | -- | ~900 | ebeam (Good) | Al2O3 | Mo, W | Very little decomposition. n = 1.61 @.55µ |
| Neodymium Oxide | Nd2O3 | 2272 | 7.24 | -- | -- | -- | ~1400 | ebeam (Good) | ThO2 | Ta, W | Loses oxygen, films clear, EB preferred. Hygroscopic n = 1.79 n varies with substrate temp. |
| Nichrome IV | Ni/Cr | 1395 | 8.50 | 0.3258 | 847 | 987 | 1217 | ebeam (Xlnt) | Al2O3, VC, BeO | W, Al2O3 coated | Alloys with refractory metals. |
| Nickel | Ni | 1453 | 8.910 | 0.331 | 927 | 1072 | 1262 | eBeam (xlnt), Thermal | Al2O3, BeO, CG | W | Alloys with refractory metals. Forms smooth adherent films. |
| Nickel Bromide | NiBr2 | 963 | 4.64 | -- | -- | -- | 362 | -- | -- | Inconel | -- |
| ........sublimes........ | |||||||||||
| Nickel Chloride | NiCl2 | 1001 | 3.55 | -- | -- | -- | 444 | -- | -- | Inconel | -- |
| ........sublimes........ | |||||||||||
| Nickel Oxide | NiO | 1990 | 7.45 | -- | -- | -- | ~1470 | -- | Al2O3 | -- | Dissociates upon heating n = 2.18 |
| Niobium (Columbium) |
Nb | 2468 | 8.55 | -- | 1728 | 1977 | 2287 | ebeam (Xlnt) | -- | W | Attacks W source. |
| Niobium Boride | NbB2 | 3050 | 6.97 | -- | -- | -- | -- | -- | -- | -- | -- |
| Niobium Carbide | NbC | 3800 | 7.82 | -- | -- | -- | -- | ebeam (Fair) | -- | -- | -- |
| Niobium Nitride | NbN | 2573 | 8.4 | -- | -- | -- | -- | -- | -- | -- | Reactive, evaporate Nb in 10-3 N2. |
| Niobium Oxide | NbO | -- | 6.27 | -- | -- | -- | 1100 | -- | -- | Pt | -- |
| Niobium Pentoxide | Nb2O5 | 1530 | 4.47 | -- | -- | -- | -- | -- | -- | W | n = 2.3 |
| Niobium Telluride | NbTex | -- | 7.6 | -- | -- | -- | -- | -- | -- | -- | Composition variable. |
| Niobium-Tin | Nb3Sn | -- | -- | -- | -- | -- | -- | ebeam (Xlnt) | -- | -- | Co-evaporate from 2 sources. |
| Niobium Trioxide | Nb2O3 | 1780 | 7.5 | -- | -- | -- | -- | -- | -- | W | -- |
| Osmium | Os | 1700 | 22.5 | -- | 2170 | 2430 | 2760 | ebeam (Fair) | -- | -- | -- |
| Palladium | Pd | 1550 | 12.40 | -- | 842 | 992 | 1192 | ebeam (Xlnt) | Al2O3, BeO | W | Alloys with refractory metals; rapid evaporation suggested. Spits in EB. |
| Palladium Oxide | PdO | 870 | 8.31 | -- | -- | -- | 575 | -- | Al2O3 | -- | Decomposes. |
| Parylene (Union Carbide) | C8H8 | 300-400 | 1.1 | -- | -- | -- | -- | -- | -- | -- | Vapor depositable plastic. |
| Copyright Lebow Corporation 1990, All Rights Reserved | |||||||||||
| Permalloy | Ni/Fe | 1395 | 8.7 | -- | 947 | 1047 | 1307 | ebeam (Good) | Al2O3, VC | W | Film low in Ni content. Use 84% Ni source. JVST Vol. 7, No. 6, p. 573 |
| Phosphorus | P | 41.4 | 1.82 | -- | 327 | 361 | 402 | -- | Al2O3 | -- | Metal reacts violently in air. |
| Platinum | Pt | 1769 | 21.45 | 0.245 | 1292 | 1492 | 1747 | eBeam (xlnt), Thermal | CG, ThO2 | W | Alloys with metals; poor adhesion; films soft |
| Plutonium | Pu | 635 | 19 | -- | -- | -- | -- | -- | -- | W | Toxic, radioactive |
| Polonium | Po | 254 | 9.4 | -- | 117 | 170 | 244 | -- | Quartz | -- | Radioactive |
| Potassium | K | 64 | .86 | -- | 23 | 60 | 125 | -- | Quartz | Mo | Metal reacts violently in air. Use gentle preheat to outgas. |
| Potassium Bromide | KBr | 730 | 2.75 | -- | -- | -- | ~450 | -- | Quartz | Mo, Ta | Use gentle preheat to outgas. n = 1.56 |
| Potassium Chloride | KCl | 776 | 1.98 | -- | -- | -- | 510 | ebeam (Good) | -- | Ta, Ni | Use gentle preheat to outgas. n = 1.49 |
| Potassium Fluoride | KF | 880 | 2.48 | -- | -- | -- | ~500 | ebeam (Poor) | Quartz | -- | Use gentle preheat to outgas. n = 1.35 |
| Potassium Hydroxide | KOH | 360 | 2.04 | -- | -- | -- | ~400 | -- | -- | Pt | Use gentle preheat to outgas. |
| Potassium Iodide | KI | 72 | 3.13 | -- | -- | -- | ~500 | -- | -- | Ta | Use gentle preheat to outgas. n = 1.68 |
| Praseodymium | Pr | 931 | 6.78 | -- | 800 | 950 | 1150 | ebeam (Good) | -- | Ta | -- |
| Praseodymium Oxide | Pr2O3 | 2125 | 6.88 | -- | -- | -- | 1400 | ebeam (Good) | ThO2 | Ir | Loses oxygen. n = 2.0 |
| Radium | Ra | 700 | 5.0 | -- | 246 | 320 | 416 | -- | -- | -- | -- |
| Rhenium | Re | 3180 | 20.53 | -- | 1928 | 2207 | 2571 | ebeam (Poor) | -- | -- | Fine wire will self-evaporate. |
| Rhenium Oxide | Re2O7 | 297 | 8.2 | -- | -- | -- | ~100 | -- | -- | -- | -- |
| Rhodium | Rh | 1966 | 12.41 | -- | 1277 | 1472 | 1707 | ebeam (Good) | ThO2, VC | W | EB gun preferred. |
| Rubidium | Rb | 38.5 | 1.47 | -- | -3 | 37 | 111 | -- | Quartz | -- | -- |
| Rubidium Chloride | RbCl | 715 | 2.76 | -- | -- | -- | ~550 | -- | Quartz | -- | n = 1.49 |
| Rubidium Iodide | RbI | 642 | 3.55 | -- | -- | -- | ~400 | -- | Quartz | -- | -- |
| Ruthenium | Ru | 2700 | 12.45 | -- | 1780 | 1990 | 2260 | ebeam (Poor) | ThO2, VC | -- | Splits violently in EB. Requires degas. |
| Samarium | Sm | 1072 | 7.54 | -- | 373 | 460 | 573 | ebeam (Good) | Al2O3 | Ta | -- |
| Samarium Oxide | Sm2O3 | 2350 | 7.43 | -- | -- | -- | -- | ebeam (Good) | ThO2 | Ir | Loses O2. Films smooth, clear. |
| Samarium Sulphide | Sm2S3 | 1900 | 5.72 | -- | -- | -- | -- | ebeam (Good) | -- | -- | AIP conf. Proc. on Mag. & Mag. Mat. B, 5, 860 (1971) |
| Scandium | Sc | 1539 | 2.99 | -- | 714 | 837 | 1002 | ebeam (Xlnt) | Al2O3, BeO | W | Alloys with Ta |
| Scandium Oxide | Sc2O3 | 2300 | 3.86 | -- | -- | -- | ~400 | ebeam (Fair) | -- | -- | Loses Oxygen. n = 1.88 @ .5µ |
| Selenium | Se | 217 | 4.79 | -- | 89 | 125 | 170 | ebeam (Good) | Al2O3, VC | W, Mo | Toxic. Poisons vacuum systems. JVST 9, 387 (1972); 12, 573 & 807 (1975) |
| Silicon | Si | 1410 | 2.42 | 0.712 | 992 | 1147 | 1337 | eBeam (Fair), sputter | BeO, Ta, VC | W, Ta | Alloys with W; use heavy W boat. SiO produced above 4x10-6 Torr. EB best. n = 3.42 App. Opt. 15, 2348 (1976) |
| Silicon Boride | SiB6 | -- | 2.47 | -- | -- | -- | -- | ebeam (Poor) | -- | -- | -- |
| Silicon Carbide | SiC | 2700 | 3.22 | -- | -- | -- | 1000 | -- | -- | -- | Sputtering preferred. |
| Silicon Dioxide | SiO2 | 1610-1710 | 2.2-2.7 | 1.000 | -- | -- | ~1025 | eBeam (Xlnt), sputter | Al2O3 | -- | Quartz excellent in EB. n = 1.47 |
| Influenced by composition | |||||||||||
| Silicon Monoxide | SiO | 1702 | 2.1 | -- | -- | -- | 850 | eBeam (Fair) | Ta | W, Ta | Baffle box source best for resistance evaporation. Low rate suggested. n = 1.6. |
| ........sublimes........ | |||||||||||
| Silicon Nitride | Si3N4 | -- | 3.44 | -- | -- | -- | ~800 | eBeam, sputter | -- | -- | n = 2.1 |
| sublimes | |||||||||||
| Silicon Selenide | SiSe | -- | -- | -- | -- | -- | 550 | -- | Quartz | -- | -- |
| Silicon Sulphide | SiS | -- | 1.85 | -- | -- | -- | 450 | -- | Quartz | -- | -- |
| sublimes | |||||||||||
| Silicon Telluride | SiTe2 | -- | 4.39 | -- | -- | -- | 550 | -- | Quartz | -- | -- |
| Silver | Ag | 961 | 10.49 | 0.529 | 847 | 958 | 1105 | eBeam (xlnt), Thermal | Al2O3, Mo | Mo, Ta | Evaporates well from any source. |
| Silver Bromide | AgBr | 432 | 6.47 | -- | -- | -- | ~380 | -- | Quartz | Ta | n = 2.25 |
| Silver Chloride | AgCl | 455 | 5.56 | -- | -- | -- | ~520 | -- | Quartz | Mo, Pt | n = 2.07 |
| Silver Iodide | AgI | 558 | 5.67 | -- | -- | -- | ~500 | -- | -- | Ta | n = 2.21 |
| Silver Iodide | AgI | 558 | 5.67 | -- | -- | -- | ~500 | -- | -- | Ta | n = 2.21 |
| Sodium | Na | 97 | .97 | -- | 74 | 124 | 192 | -- | Quartz | Ta, S.S. | Use gentle preheat to outgas. Metal reacts violently in air. |
| Sodium Bromide | NaBr | 755 | 3.20 | -- | -- | -- | ~400 | -- | Quartz | -- | Use gentle preheat to outgas. n = 1.64 |
| Sodium Chloride | NaCl | 801 | 2.16 | -- | -- | -- | 530 | ebeam (Good) | Quartz | Ta, Mo, W | Cu ovens, little decomposition. Use gentle preheat to outgas. n = 1.54 |
| Sodium Cyanide | NaCN | 563 | -- | -- | -- | -- | ~550 | -- | -- | Ag | Use gentle preheat to outgas. n = 1.45 |
| Sodium Fluoride | NaF | 988 | 2.79 | -- | -- | -- | ~700 | ebeam (Good) | BeO | Mo, Ta, W | Use gentle preheat to outgas. No decomposition n = 1.30 @ .55µ |
| Sodium Hydroxide | NaOH | 318 | 2.13 | -- | -- | -- | ~470 | -- | -- | Pt | Use gentle preheat to outgas. n = 1.36 |
| Spinel | MgO3 5Al2O3 |
-- | 8.0 | -- | -- | -- | -- | ebeam (Good) | -- | -- | n = 1.72 |
| Strontium | Sr | 769 | 2.6 | -- | 239 | 309 | 403 | ebeam (Poor) | VC | W, Ta, Mo | Wets but does not alloy with refractory metals. May react violently in air. |
| Strontium Fluoride | SrF2 | 1190 | 4.24 | -- | -- | -- | ~1000 | -- | Al2O3 | -- | n = 1.44 |
| Strontium Oxide | SrO | 2460 | 4.7 | -- | -- | -- | 1500 | -- | Al2O3 | Mo | Reacts with Mo, and W; n = 1.87 |
| ........sublimes........ | |||||||||||
| Strontium Sulphide | SrS | Above 2000 |
3.70 | -- | -- | -- | -- | -- | -- | Mo | Decomposes. n = 2.11 |
| Sulphur | S8 | 115 | 2.0 | -- | 13 | 19 | 57 | ebeam (Poor) | Quartz | W | Poisons vacuum system. |
| Supermalloy | Ni/Fe/Mo | 1410 | 8.9 | -- | -- | -- | -- | ebeam (Good) | -- | -- | Sputtering preferred; co-evaporate from 2 sources, Permalloy and Mo. |
| Tantalum | Ta | 2996 | 16.6 | -- | 1960 | 2240 | 2590 | ebeam (Xlnt) | -- | -- | Forms good films. |
| Tantalum Boride | TaB2 | 3000 | 12.38 | -- | -- | -- | -- | -- | -- | -- | -- |
| Tantalum Carbide | TaC | 3880 | 14.65 | -- | -- | -- | ~2500 | -- | -- | -- | JVST 12, 811 (1975) |
| Tantalum Nitride | TaN | 3360 | 16.30 | -- | -- | -- | -- | -- | -- | -- | Reactive; evaporate Ta in 10-3N2. |
| Tantalum Pentoxide | Ta2O5 | 1800 | 8.74 | -- | 1550 | 1780 | 1920 | ebeam (Good) | VC | W, Ta | Slight decomposition; evaporate in 10-3 Torr of O2. n = 2.0 @ 1.5µ App. Opt. 19, 1737 (1980) |
| Tantalum Sulphide | TaS2 | 1300 | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Technetium | Tc | 2200 | 11.5 | -- | 1570 | 1800 | 2090 | -- | -- | -- | -- |
| Teflon | PTFE | 330 | 2.9 | -- | -- | -- | -- | -- | -- | W | Baffled source. Film structure doubtful. |
| Tellurium | Te | 452 | 6.25 | -- | 157 | 207 | 277 | ebeam (Poor) | Al2O3, Quartz | W, Ta | Wets without alloying. Toxic. |
| Terbium | Tb | 1357 | 8.27 | -- | 800 | 950 | 1150 | ebeam (Xlnt) | Al2O3 | Ta | -- |
| Terbium Fluoride | TbF3 | 1176 | -- | -- | -- | -- | ~800 | -- | -- | -- | -- |
| Terbium Oxide | Tb2O3 | 2387 | 7.87 | -- | -- | -- | 1300 | -- | -- | Ir | Partially decomposes. |
| Terbium Oxide | Tb4O7 | -- | -- | -- | -- | -- | -- | -- | -- | Ta | Films TbO. |
| Thallium | Tl | 302 | 11.85 | -- | 280 | 360 | 470 | ebeam (Poor) | Al2O3, Quartz | W, Ta | Wets freely, very Toxic. |
| Thallium Bromide | TlBr | 480 | 7.56 | -- | -- | -- | ~250 | -- | Quartz | Ta | Toxic n = 2.3 |
| ........sublimes........ | |||||||||||
| Thallium Chloride | TlCl | 430 | 7.00 | -- | -- | -- | ~150 | -- | Quartz | Ta | Toxic n = 2.25 |
| ........sublimes........ | |||||||||||
| Copyright Lebow Corporation 1990, All Rights Reserved | |||||||||||
| Thallium Iodide (B) |
TlI | 440 | 7.09 | -- | -- | -- | ~250 | -- | Quartz | -- | Toxic n = 2.78 |
| ........sublimes........ | |||||||||||
| Thallium Oxide | Tl2O3 | 717 | 9.65 | -- | -- | -- | 350 | -- | -- | -- | Toxic, Goes to Tl2O @ 850° C. |
| Thorium | Th | 1875 | 11.7 | -- | 1430 | 1660 | 1925 | ebeam (Xlnt) | W | W, Ta, Mo | Toxic, radioactive. |
| Thorium Bromide | ThBr4 | -- | 5.67 | -- | -- | -- | -- | -- | -- | Mo | Toxic n = 2.47 @ 5µ |
| ........sublimes........ | |||||||||||
| Thorium Carbide | ThC2 | 2773 | 8.96 | -- | -- | -- | ~2300 | -- | Carbon | -- | Radioactive. |
| Thorium Dioxide | ThO2 | 3050 | 10.03 | -- | -- | -- | ~2100 | ebeam (Good) | -- | -- | Radioactive. n = 1.86 @ 2.2µ |
| Thorium Fluoride | ThF4 | 1110 | 6.3 | -- | -- | -- | ~750 | ebeam (Fair) | VC | Mo | Radioactive. n = 1.52 Heat substrate to above 150° C. JVST 12, 919, (1975) |
| Thorium Oxyfluoride | ThOF2 | 900 | 9.1 | -- | -- | -- | -- | -- | -- | Mo, Ta | Radioactive. n = 1.52 |
| Thorium Sulphide | ThS2 | -- | 6.80 | -- | -- | -- | -- | -- | -- | -- | Sputtering preferred; co-evaporate from 2 sources. |
| Thulium | Tm | 1545 | 9.32 | -- | 461 | 554 | 680 | ebeam (Good) | Al2O3 | Ta | -- |
| ........sublimes........ | |||||||||||
| Thulium Oxide | Tm2O3 | -- | 8.90 | -- | -- | -- | 1500 | -- | -- | Ir | Decomposes. |
| Tin | Sn | 232 | 7.75 | 0.724 | 682 | 807 | 997 | eBeam (Xlnt), Thermal | Al2O3, Ta | Mo | Wets Mo; use Ta liner in EB guns. |
| Tin Oxide | SnO2 | 1127 | 6.95 | -- | -- | -- | ~1000 | ebeam (Xlnt) | Al2O3, Quartz | W | Films from W oxygen deficient, oxidize in air. n = 2.0 |
| ........sublimes........ | |||||||||||
| Tin Selenide | SnSe | 861 | 6.18 | -- | -- | -- | ~400 | ebeam (Good) | Quartz | -- | JVST 12, 110 (1975) |
| Tin Sulphide | SnS | 882 | 5.08 | -- | -- | -- | ~450 | -- | Quartz | -- | -- |
| Tin Telluride | SnTe | 780 | 6.44 | -- | -- | -- | ~450 | -- | Quartz | -- | -- |
| Titanium | Ti | 1675 | 4.50 | 0.628 | 1067 | 1235 | 1453 | eBeam (Xlnt), Thermal | TiC | W | Alloys with refractory metals. Evolves gas on first heating. |
| Titanium Boride | TiB2 | 2980 | 4.50 | -- | -- | -- | -- | ebeam (Poor) | -- | -- | -- |
| Titanium Carbide | TiC | 3140 | 4.93 | -- | -- | -- | ~2300 | -- | -- | -- | JVST 12, 851, (1975) |
| Titanium Dioxide (rutile) | TiO2 | 1640 | 4.29 | -- | -- | -- | ~1300 | ebeam (Fair) | -- | W, Mo | Evaporate in 10-4 of O2 onto 350° substrates. n = 2.4 App. Opt. 15, 2986 (1976) |
| Titanium Monoxide | TiO | 1750 | 4.93 | -- | -- | -- | ~1500 | ebeam (Good) | VC | W, Mo | Use gentle preheat to outgas. Films TiO2 if evaporated like TiO2; n = 2.2 |
| Titanium Nitride | TiN | 2930 | 5.43 | -- | -- | -- | -- | ebeam (Good) | -- | Mo | Sputtering preferred. Decomposes with thermal evaporation. |
| Titanium Sesquioxide | Ti2O3 | 2130 | 4.6 | -- | -- | -- | -- | ebeam (Good) | -- | W | Decomposes. |
| Tungsten | W | 3410 | 19.30 | 0.163 | 2117 | 2407 | 2757 | eBeam (good), Thermal | -- | -- | Forms violate oxides. Films hard & adherent. |
| Tungsten Boride | WB2 | 2900 | 12.75 | -- | -- | -- | -- | eBeam (Poor) | -- | -- | -- |
| Tungsten Carbide | W2C | 2860 | 17.15 | -- | 1480 | 1720 | 2120 | eBeam (Xlnt) | -- | C | -- |
| Tungsten Telluride | WTe3 | -- | 9.49 | -- | -- | -- | -- | -- | Quartz | -- | -- |
| Tungsten Trioxide | WO3 | 1473 | 7.16 | -- | -- | -- | 980 | ebeam (Good) | -- | W, Pt | Use gentle preheat to outgas. W reduces oxides slightly. n = 1.68 |
| ........sublimes........ | |||||||||||
| Uranium | U | 1132 | 19.07 | -- | 1132 | 1327 | 1582 | eBeam (Good) | -- | W, Mo | Films oxidize. |
| Uranium Carbide | UC2 | 2260 | 11.28 | -- | -- | -- | 2100 | -- | Carbon | -- | Decomposes. |
| Uranium Dioxide | UO2 | 2176 | 10.9 | -- | -- | -- | -- | -- | -- | W | Ta causes decomposition. |
| Uranium Fluoride | UF4 | ~1000 | -- | -- | -- | -- | 300 | -- | -- | Ni | -- |
| Uranium Oxide | U3O8 | Decomposes | 8.3 | -- | -- | -- | -- | -- | -- | W | Decomposes at 1300° C to UO2. |
| Uranium Phosphide | UP2 | -- | 8.57 | -- | -- | -- | 1200 | -- | -- | Ta | Decomposes. |
| Uranium Sulphide | U2S3 | -- | -- | -- | -- | -- | 1400 | -- | -- | W | Slight decomposition. |
| Vanadium | V | 1890 | 5.96 | -- | 1162 | 1332 | 1547 | eBeam (Xlnt) | -- | W, Mo | Wets Mo. EB evaporated films preferred. |
| Vanadium Boride | VB2 | 2400 | 5.10 | -- | -- | -- | -- | -- | -- | -- | -- |
| Vanadium Carbide | VC | 2810 | 5.77 | -- | -- | -- | ~1800 | -- | -- | -- | -- |
| Vanadium Dioxide | VO2 | 1967 | 4.34 | -- | -- | -- | ~575 | -- | -- | -- | Deposit metal in 1 X 10-3O2 JVST A2(2) 301 (1984) |
| ........sublimes........ | |||||||||||
| Vanadium Nitride | VN | 2320 | 6.13 | -- | -- | -- | -- | -- | -- | -- | -- |
| Vanadium Pentoxide | V2O5 | 690 | 3.36 | -- | -- | -- | ~500 | -- | Quartz | -- | -- |
| Vanadium Silicide | VSi2 | 1700 | 4.42 | -- | -- | -- | -- | -- | -- | -- | -- |
| Ytterbium | Yb | 824 | 6.98 | -- | 520 | 590 | 690 | ebeam (Good) | -- | Ta | -- |
| ........sublimes........ | |||||||||||
| Ytterbium | YbF3 | 1157 | 8.17 | -- | -- | -- | ~800 | -- | -- | Mo | n = 1.57 @3.8µ |
| Ytterbium Oxide | Yb2O3 | 2346 | 9.17 | -- | -- | -- | ~1500 | -- | -- | Ir | Loses Oxygen. |
| ........sublimes........ | |||||||||||
| Yttrium | Y | 1509 | 4.48 | -- | 830 | 973 | 1157 | ebeam (Xlnt) | Al2O3 | W, Ta | High Ta solubility |
| Yttrium Aluminum Oxide | Y3Al5O12 | 1990 | -- | -- | -- | -- | -- | ebeam (Good) | -- | W | Films not terroelectric. |
| Yttrium Fluoride | YF3 | 1387 | 4.01 | -- | -- | -- | -- | -- | -- | -- | -- |
| Yttrium Oxide | Y2O3 | 2680 | 4.84 | -- | -- | -- | ~2000 | ebeam (Good) | C | W | Loses Oxygen. films smooth and clear. n = 1.79 @ 1µ |
| ........sublimes........ | |||||||||||
| Zinc | Zn | 419 | 7.14 | 0.514 | 127 | 177 | 250 | eBeam (Xlnt), Thermal | Al2O3, Quartz | Mo, W, Ta | Evaporates well under wide range of conditions. |
| Zinc Antimonide | Zn3Sb2 | 546 | 6.3 | -- | -- | -- | -- | -- | -- | -- | -- |
| Zinc Bromide | ZnBr2 | 394 | 4.22 | -- | -- | -- | ~300 | -- | C | W | Decomposes. |
| Zinc Fluoride | ZnF2 | 872 | 4.84 | -- | -- | -- | ~800 | -- | Quartz | Pt, Ta | -- |
| Zinc Nitride | Zn3N2 | -- | 6.22 | -- | -- | -- | -- | -- | -- | Mo | Decomposes. |
| Zinc Oxide | ZnO | 1975 | 5.61 | -- | -- | -- | ~1800 | ebeam (Fair) | -- | -- | Anneal in air at 450° C to reoxidize; n = 2.0 JVST 12, 879 (1975) |
| Zinc Selenide | ZnSe | 1526 | 5.42 | -- | -- | -- | 660 | -- | Quartz | Mo, W, Ta | Use gentle preheat to outgas. Evaporates well n = 2.6. |
| Zinc Sulphide | ZnS | 1830 | 4.09 | -- | -- | -- | ~800 | ebeam (Good) | -- | Ta, Mo | Use gentle preheat to outgas. Films partially decompose. Sticking coefficient varies with substrate temperature. n = 2.3 @ .5µ |
| ........sublimes........ | |||||||||||
| Zinc Telluride | ZnTe | 1238 | 6.34 | -- | -- | -- | ~600 | ebeam (Fair) | -- | Mo, Ta | Use gentle preheat to outgas. n = 2.85 @ .5µ |
| Zircon | ZrSiO4 | 2550 | 4.56 | -- | -- | -- | -- | -- | -- | -- | -- |
| Zirconium | Zr | 1852 | 6.40 | -- | 1477 | 1702 | 1987 | eBeam (Xlnt) | -- | W | Alloys with W. Films oxidize readily. |
| Zirconium Boride | ZrB2 | 3040 | 6.08 | -- | -- | -- | -- | ebeam (Good) | -- | -- | -- |
| Zirconium Carbide | ZrC | 3540 | 6.73 | -- | -- | -- | ~2500 | -- | -- | -- | -- |
| Zirconium Nitride | ZrN | 2980 | 7.09 | -- | -- | -- | -- | -- | -- | -- | Reactively evaporate in 10-3N2 atmosphere. |
| Zirconium Oxide | ZrO2 | 2700 | 5.49 | -- | -- | -- | ~220 | ebeam (Good) | -- | W | Films oxygen deficient, clear and hard. n = 2.05 @.75µ |
| Zirconium Silicide | ZrSi2 | 1700 | 4.88 | -- | -- | -- | -- | -- | -- | -- | -- |
| Copyright Lebow Corporation 1990, All Rights Reserved | |||||||||||
| Element | Symbol | Melting Point °C |
Density (bulk, g/cm3) | Z-ratio | Temperature°C @ Vapor Pressure (Torr) |
Evaporation Method | Crucible | Boat | Remarks | ||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 10-8 | 10-6 | 10-4 | |||||||||