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Shipley 1.2L
Shipley 1.2L is useful for many thin photoresist applications.
Notes:
For 0.5 micron features, include the following steps:
- Use hard contact exposure.
- Clean the mask in between each exposure.
Results (Using the method used on the chemicals and materials table):
Channel Width (um) x Separation (um) | SEM Characterization |
0.5x0.5 | |
1x1 | |
1x8 | |
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